Description
Design Features
- Low profile for space-conscious applications
- Noncontact direct-drive
- High repeatability
- Integral pneumatic counterbalance
- Easily configured with WaferMaxT for multi-axis applications
Superior Mechanical Design
Bearing elements are crossed-roller style for maximum smoothness and reliability. These are mounted on an optimized base and wedge assembly for stiffness and low mass/inertia, enhancing dynamic performance.
All the critical elements of the WaferMaxZ were selected to operate in a 24/7 industrial environment and, unlike screw- or piezo-based vertical stages, the WaferMaxZ requires no maintenance and will ensure years of trouble-free operation.
Brushless Direct-Drive
To maximize positioning performance, the WaferMaxZ utilizes Aerotech’s BLMUC-series brushless, slotless linear motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMaxZ ideal for contoured motion, smooth scan velocity or precise incremental steps.
Accurate Positioning
Performance is assured with a precision linear encoder that results in 0.8 nm resolution. The motor and high-performance linear encoder are directly coupled to increase accuracy.
Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
