ANT130XY Two-Axis XY Nanopositioning Stages

Description

Design Features

• Enhanced second-generation design
• Achieves minimum incremental motion to 0.5 nm - NEW
• Optimizes orthogonality, straightness & flatness with integrated XY design
• Guarantees two-dimensional accuracy of ±225 nm or better with ULTRA calibration option
• Features high-precision crossed-roller bearings for excellent dynamic performance & ample load capacity
• Maximizes process throughput & reliability with ironless direct-drive linear motor
• Available with high-resolution incremental or absolute encoders - NEW

Key Applications

ANT130XY is ideal for multi-axis applications that require high precision and dynamic positioning performance, including:

• Photonics assembly & inspection
• Fiber alignment & optimization
• Optics manufacturing, testing & inspection
• Sensor testing & qualification
• Semiconductor processing & inspection
• Surface metrology & profilometry
• Research & laboratory applications

Ultra-Precise Stage Design

ANT130XY’s integrated two-axis design allows you to optimize critical geometric elements such as orthogonality, straightness and flatness, resulting in a stage with exceptional motion characteristics. Our direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. ANT130XY is available in three travel options ranging from 60 mm x 60 mm to 160 mm x 160 mm, all featuring a compact overall height of 85 mm.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130XY stages use our advanced direct-drive technology to achieve the highest level of positioning performance. Coupled with anti-creep, crossed-roller bearings, ANT130XY delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to enhance your process capability. The optimized drive and bearing combination, packaged in a compact form factor, offers distinct performance advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT130XY family has universal mounting and tabletop patterns that allow for easy system integration. ANT130XY stages are easily combined with other products -- including ANT130LZ, ANT130R, ANT130V, ANT20G and more -- to provide complex, multiple degree-of-freedom motion and positioning solutions.

ULTRA Performance Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, we’ve developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system is completely assembled, functionally tested and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions that ensure calibration with the best test equipment, using the highest-precision mechanical elements and ULTRA software capabilities of our industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT130XY, we are able to produce guaranteed two-dimensional accuracies of ±225 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT130XY and the ULTRA version. ULTRA calibration virtually eliminates straightness, orthogonality and accuracy errors resulting from yaw.