Description

Design Features

• Custom-engineered designs with linear motion components integrated directly into a granite structure
• Granite air-bearing surfaces offer precise, repeatable motion over the entire travel length
• Single-axis configuration can be easily incorporated as a part of a larger machine build or serve as a stand-alone axis
• Design is scalable based on application requirements for travel length, payload and dynamic performance

Built directly onto a granite structure, this direct-drive, linear air-bearing stage provides long travel and exceptional geometric and dynamic performance for testing, optical metrology, motion simulation and laser processing applications. The granite base offers excellent stiffness and thermal stability.

Because they are specifically engineered to meet a customer’s application requirements, IGM motion systems represent the pinnacle of design flexibility. From drive and bearing type selection to system layout and arrangement, IGM systems are available with a wide variety of value-adding accessories and state-of-the-art control electronics. Aerotech’s motion engineers regularly custom-tailor IGM systems to meet unique technical and commercial application requirements.

The integrated nature of an IGM system results in unique technical benefits. The granite structure is able to offer increased stiffness over traditional stages in certain situations, contributing to improved dynamic performance. Further, the simplified structural design serves to reduce the axis profile and minimize design offsets, resulting in a reduction in Abbe errors and therefore more accurate motion at the desired workpoint.

See our case study for a comparison of an IGM system versus a traditional stage-on-granite system.