Multiple Z-Axes Split Bridge System
Multiple Z-Axes Split Bridge System
- Custom-engineered split-axis Cartesian subsystem to minimize positioning errors
- Mechanical bearing axes for high load capacity and dynamic processing
- Granite base with passive isolation system and steel weldment designed to reduce external disturbances
- Four overhead processing tool carriages for more flexibility and throughput
- Large working plane in X and Y for large substrates or multiple work locations