Linear-Rotary Air Bearing System
Linear-Rotary Air Bearing System
- Motion subsystem designed to incorporate customer equipment on top of a continuous rotation rotary axis
- Integrated low-noise slip ring to pass electrical signals through the rotation stage
- High-precision air-bearing vertical stage to reduce geometric errors throughout stage travel
- Integrated pneumatic counterbalance to support vertically oriented linear motor and customer payload
- Applications include metrology and inspection