Dual-Carriage Air-Bearing IGM System
The dual stainless-steel carriage, linear air-bearing stage provides exceptional straightness, flatness, roll, pitch and yaw performance for testing, optical metrology and laser processing applications. It can be used in horizontal (as shown), inverted or upright applications. The granite base provides excellent stiffness and thermal stability.
Description
Specifications
Downloads
Description
Description
Specifications
Downloads
Description
Design Features
- Granite stage, stainless-steel carriages
- 1 m travel for each carriage
- 0.25g, 250 mm/s with 5 kg load
- ±2.5 µm straightness, ±5 µm flatness
- ±2.5 arc-sec roll, pitch, yaw
- ±1 µm accuracy calibrated, ±0.6 µm repeatability
- 50 kg load capacity per carriage