ANT95V-3 Single-Axis Lift Direct-Drive Nanopositioning Stage
ANT95V-3 is a linear-motor-driven, wedge-style vertical lift stage. It can be easily integrated with other stages, including those in the ANT95 family, for superior multi-axis performance and is offered in two accuracy grades.
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Design Features
- Nanometer performance with 3 mm vertical travel
- High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
- In-position stability of <1 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
Noncontact Direct-Drive
All of the original ANT series' direct-drive advantages have been preserved in the ANT95V-3 family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95V-3 stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95V-3 family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95V-3 stage's industry-leading 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech's direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
Dimensions
ANT95V-3
Ordering Information
Mounting Plate (Optional)
| Option | Description |
| -MP | Mounting Plate |
Performance Grade (Required)
| Option | Description |
| -PL1 | Base Performance |
| -PL2 | High-Accuracy Performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
| Option | Description |
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |