ANT95R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages
ANT95R direct-drive rotary stages offer unprecedented in-position stability and sub 0.01 arc-sec incremental motion performance and are offered in two grades of accuracy. The compact size allows for easy integration with other motion axes and systems.
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Design Features
- 0.01 arc sec resolution
- 0.005 arc sec in-position stability
- Outstanding error motion specifications
- Multi-axis configurations
- High dynamic performance
- Both limited and unlimited rotation
Multi-Axis Capabilities
The ANT95R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.
Dynamic Performance
In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for processes that require speed and precision.
Durability
The ANT95R stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT95-R requires no periodic maintenance, assuring years of trouble-free operation.
Dimensions
ANT95R
Ordering Information
Travel (Required)
| Option | Description |
| -360 | Continuous travel |
| -20 | Limited travel, ±10 degrees |
| -180 | Limited travel, ±90 degrees |
Mounting Plate (Optional)
| Option | Description |
| -MP | Mounting plate |
Performance Grade (Required)
| Option | Description |
| -PL1 | Base performance |
| -PL2 | High-accuracy performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
| Option | Description |
| -TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |