ANT95LZS Low-Profile Z Nanopositioning Stages
ANT95LZS stages — the newest members of the ANT family — represent the ultimate in vertical motion performance with an ultra-low profile. Featuring dual side-mounted pneumatic counterbalances with extremely low frictional characteristics, they are best-in-class in combining resolution, accuracy, repeatability, size and reliability. With their impressive dynamic capabilities and enhanced load-carrying capacity, ANT95LZS stages are the premier choice when you need superior quality vertical motion in a compact form factor.
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Design Features
- Achieves minimum incremental motion to 1 nm
- Delivers nanometer-level positioning performance over travel lengths up to 100 mm
- Provides ultra-low profile with dual side-mounted counterbalances capable of offsetting up to 5 kg payload for ultra-precise performance in the vertical direction
- Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
- Maximizes process throughput & reliability with ironless direct-drive linear motor
- Available with high-resolution incremental or absolute encoders - NEW
Key Applications
ANT95LZS is ideal for multi-axis applications that require high precision and dynamic positioning performance, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Industry-Leading Motion Performance
Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Available with an improved high-performance encoder option, ANT95LZS can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95LZS stages use our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95LZS family has universal mounting and tabletop patterns that allow for easy system integration. The low-profile design makes these stages ideal for mounting to bridges and gantries. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. ANT95LZS stages are easily combined with other products -- including ANT95L, ANT95XY, ANT95R, ANT95V, ANT20G and more -- to achieve complex, multiple degree-of-freedom motion and positioning solutions.
Dimensions
ANT95LZS
Ordering Information
Travel (Required)
| Option | Description |
| -025 | 25 mm travel |
| -050 | 50 mm travel |
| -100 | 100 mm travel |
| Note: | Other travel options are available upon request. Contact Aerotech for more information. |
Feedback (Required)
| Option | Description |
| -E1 | Incremental linear encoder, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoder, digital RS422 output, 5 nm electrical resolution |
| -E3 | Absolute + Incremental 1 Vpp linear dual-track encoder |
| -E4 | Incremental linear encoder, 1 Vpp amplified sine output, high-performance |
Mounting Plate (Optional)
| Option | Description |
| -MP | Mounting Plate |
Performance Grade (Required)
| Option | Description |
| -PL1 | Base Performance |
| -PL2 | High-accuracy performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
| Option | Description |
| -TAS | Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |