Description
Key Features
- Delivers nanometer-level positioning performance over 5 mm of vertical travel
- Ironless direct-drive linear motor maximizes process throughput & provides high-dynamic performance
- Anti-creep crossed-roller bearings minimize geometric errors & provide ultra-smooth motion
- Robust design ensures excellent reliability in both lab & production environments
- Integrates easily into multi-axis assemblies & motion subsystems
Key Applications
This compact, highly capable lift stage offers advantages in applications such as:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Focal height adjustment & autofocusing
- Semiconductor processing & inspection
- Research & laboratory applications
Noncontact Direct-Drive Design
All of the original ANT series’ direct-drive advantages have been preserved in the ANT130V-5 family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130V-5 stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT130V-5 family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT130V-5 stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
