ANT95LZ Single-Axis Z Nanopositioning Stages
Our second-generation ANT95LZ stages are specifically engineered to provide nanometer-level motion and positioning performance in the vertical orientation. A user-adjustable, ultra low-friction pneumatic counterbalance makes them best-in-class in combining resolution, accuracy, repeatability, size and reliability. Their impressive dynamic capabilities and enhanced load-carrying capacity make ANT95LZ stages an excellent choice when you need superior vertical motion.
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Description
Specifications
Dimensions
Ordering Info
Downloads
Description
Design Features
- Enhanced second-generation design
- Achieves minimum incremental motion to 1 nm - NEW
- Delivers nanometer-level positioning performance over travel lengths up to 50 mm
- Offsets payloads up to 5 kg for precise performance in the vertical direction with user-adjustable, ultra low-friction counterbalance
- Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
- Maximizes process throughput & reliability with ironless direct-drive linear motor
- Available with high-resolution incremental or absolute encoders - NEW
Key Applications
ANT95LZ is ideal for multi-axis applications that require high precision and dynamic positioning performance, including:
- Photonics assembly & inspection
- Fiber alignment & optimization
- Optics manufacturing, testing & inspection
- Sensor testing & qualification
- Semiconductor processing & inspection
- Research & laboratory applications
Industry-Leading Motion Performance
Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT95LZ can easily achieve minimum incremental steps of 1 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion. Plus, the minimally-influencing counterbalance design opposes the gravitational forces induced by your payload, resulting in industry-leading performance and optimum thermal stability.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95LZ stages use our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95LZ family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. Also available as an even lower-profile dual-counterbalance variant, ANT95LZ stages are easily combined with other products -- including ANT95L, ANT95XY, ANT95R, ANT95V, ANT20G and more -- to achieve complex, multiple degree-of-freedom motion and positioning solutions.
Dimensions
ANT95LZ-025
ANT95LZ-050
Ordering Information
Travel (Required)
| Option | Description |
| -025 | 25 mm travel |
| -050 | 50 mm travel |
Feedback (Required)
| Option | Description |
| -E1 | Incremental linear encoder, 1 Vpp amplified sine output |
| -E2 | Incremental linear encoder, digital RS422 output, 5 nm electrical resolution |
| -E3 | Absolute + Incremental 1 Vpp linear dual-track encoder |
| -E4 | Incremental linear encoder, 1 Vpp amplified sine output, high-performance |
Cable Orientation (Required)
| Option | Description |
| -CBL1 | Right-hand cable exit |
| -CBL2 | Left-hand cable exit |
Performance Grade (Required)
| Option | Description |
| -PL1 | Base Performance |
| -PL2 | High-accuracy performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
| Option | Description |
| -TAS | Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
| -TAC | Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |