ANT95L Single-Axis Linear Nanopositioning Stages

Our second-generation ANT95L linear stages are the leading solution for addressing your nanometer-level motion and positioning needs. Available in a variety of configurations, they’re best-in-class in combining resolution, accuracy, repeatability, size and reliability. Plus, with impressive dynamic capabilities and an enhanced load-carrying capacity, ANT95L stages are an excellent choice to amplify your process.

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Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Specifications

Dimensions

Ordering Info

Downloads

Description

Design Features

Enhanced second-generation design
Achieves minimum incremental motion to 0.5 nm - NEW
Delivers nanometer-level positioning performance over travel lengths up to 100 mm
Features high-precision crossed-roller bearings for excellent dynamic performance & generous load capacity
Optimizes process throughput & maximizes reliability with ironless direct-drive linear motor
Integrates easily into multi-axis assemblies & motion subsystems
Available with high-resolution incremental or absolute encoders - NEW

Key Applications

ANT95L stages are ideal for high-precision and high-dynamic positioning applications, including:

Photonics assembly & inspection
Fiber alignment & optimization
Optics manufacturing, testing & inspection
Sensor testing & qualification
Semiconductor processing & inspection
Research & laboratory applications

Industry-Leading Motion Performance

Outstanding accuracy, position repeatability and in-position stability require extremely fine system resolution. Now available with an improved high-performance encoder option, ANT95L can easily achieve minimum incremental steps of 0.5 nm. Our direct-drive technology exhibits no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95L stages use our advanced direct-drive technology to achieve the highest level of positioning performance. This direct-drive technology delivers ultra-smooth, consistent motion with outstanding dynamic characteristics to optimize your process throughput. The unique drive and bearing combination, packaged in an extremely compact form factor, offers tangible advantages in many applications such as high-precision positioning, fiber alignment, optics manufacturing and inspection, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations. Also available in an integrated XY arrangement, ANT95L stages are easily combined with other products — including ANT95LZ, ANT95LZS, ANT95R, ANT95V, ANT20G and more — to achieve complex, multiple degree-of-freedom motion and positioning solutions.

ANT95L Specifications

	ANT95L-025	ANT95L-050	ANT95L-100
Travel	25 mm	50 mm	100 mm
Accuracy-Base Performance (-PL1)(1)	±2.5 µm		±5.0 µm
Accuracy-PLUS Performance (-PL2)(1)	± 250 nm (-E1, -E2, -E3) ± 175 nm (-E4)		± 275 nm (-E1, -E2. -E3) ± 200 nm (-E4)
Repeatability (Bidirectional)(1)	±75 nm
Resolution (Minimum Incremental Motion)	1 nm (-E1) 5 nm (-E3) 0.5 nm (-E4)
Straightness(1)	±1.0 µm		±2.5 µm
Flatness(1)	±1.0 µm		±2.5 µm
Pitch	10 arc sec
Roll	10 arc sec
Yaw	5 arc sec
Maximum Speed	500 mm/s (-E1, -E3, -E4) 145 mm/s (-E2)
Maximum Acceleration (No Load)	5 g	4 g	3 g
Speed Stability	See graph for typical performance
Settling Time	See graph for typical performance
In-Position Stability(2)	<1 nm (-E1) <5 nm (-E3) <0.5 nm (-E4)
Load Capacity-Horizontal(3)	5 kg	7 kg
Load Capacity-Side(3)	5 kg
Moving Mass	0.45 kg	0.63 kg	0.95 kg
Stage Mass	0.96 kg	1.36 kg	2.03 kg
Material	Anodized Aluminum
MTBF (Mean Time Between Failure)	30,000 hours

Notes:

Certified with each stage.
In-position stability is reported as 3-sigma value. Requires a 1 Vpp encoder.
Payload specifications assume payload is centered on-axis.
Specifications are reported for a single axis measured 25 mm above the tabletop. Performance of multi-axis systems depends on the payload and workpoint. Consult factory for multi-axis or non-standard applications.
PLUS performance requires the use of an Aerotech controller.
To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult factory for more information.

ANT95L Electrical Specifications

	ANT95L-025	ANT95L-050	ANT95L-100
Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder 1 Vpp with 20 µm signal period (-E1) Digital RS422 with 5 nm electrical resolution (-E2) BiSS-C absolute + incremental 1 Vpp linear dual-track encoder (-E3) 1 Vpp with 4 µm signal period (-E4)
Maximum Bus Voltage	±40 VDC
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Dimensions

ANT95L-025

ANT95L-050

ANT95L-100

Ordering Information

Travel (Required)

Option	Description
-025	25 mm travel
-050	50 mm travel
-100	100 mm travel

Note:

Other travel options are available upon request. Contact Aerotech for more information.

Feedback (Required)

Option	Description
-E1	Incremental linear encoder, 1 Vpp amplified sine output
-E2	Incremental linear encoder, digital RS422 output, 5 nm electrical resolution
-E3	Absolute + Incremental 1 Vpp linear dual-track encoder
-E4	Incremental linear encoder, 1 Vpp amplified sine output, high-performance

Mounting Plate (Optional)

Option	Description
-MP	Mounting plate

Performance Grade (Required)

Option	Description
-PL1	Base performance
-PL2	High-accuracy performance, PLUS

Integration (Required)

Option	Description
-TAS	Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC	Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Note:

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

ANT95L Data Sheet ANT95L Product Manual Multi-Axis Photonics Alignment Solutions Sheet ANT95L CAD Download

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ANT95L Single-Axis Linear Nanopositioning Stages

Description

Design Features

Key Applications

Industry-Leading Motion Performance

Noncontact Direct-Drive

Flexible System Design

ANT95L Specifications

ANT95L Electrical Specifications

Dimensions

Ordering Information

Travel (Required)

Feedback (Required)

Mounting Plate (Optional)

Performance Grade (Required)

Integration (Required)

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